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Selected Document Category:Document Awaiting to be Published
Source:International Electrotechnical Commission
Anticipated Publication Year:2015
Publication Year:
Acronym:IEC
Identifier:IEC 62659
Document Title:Large scale manufacturing for nanoelectronics
url:http://www.iec.ch/dyn/www/f?p=103:38:0::::FSP_ORG_ID,FSP_APEX_PAGE,FSP_LANG_ID,FSP_PROJECT:1315,23,25,IEC/IEEE%2062659%20Ed.%201.0
Scope:

This standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. CNT, graphene, quantum dots, etc.) (fabs). Since semiconductor fabs must incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor fabs, and must be introduced in a structured and methodical way.
This standard suggests generic steps that might be employed to facilitate the introduction of nanomaterials into the fabs. This sequence is described below under the areas of Raw Materials Acquisition, Materials Processing, Design, IC Fabrication, Testing, and End-Use. These activities represent the major stages of the supply chain in a fab.

Keywords:nanoscale; contacts; nanomanufacturing; graphene; carbon nanotubes; nanotechnology; process; bottom-
Type of Document:a. Standard
Issues Areas:Terminology and Nomenclature
Measurement and Characterizations
Material Specifications
Performance Methods
Product Specifications
Primary Category:General Industry/Manufacturing
Additional Categories
Goal or Need:
Intended Stakeholders:
Is it Being Implemented:
Submitter's Name:Mike Leibowitz
Submitter's e-mail:[email protected]
Submitter's Company:NEMA
Additional Comments:
Contact for Additional Info:mike.leibowitz at nema.org



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